The company is currently Europe's highest valued and the customer list includes companies such as TSM, Intel, Samsung and Open AI.
The order intake landed at 5.4 billion euro the last quarter, analysts had expected 4.9 billion euro, according to Bloomberg's compilation.
Since ASML's machines are used to make chips for AI, the company benefits from many companies now making large investments in the technology. The share has risen by 25 percent so far this year.