The net profit increased by 57 percent to 374.6 billion Taiwanese dollars (equivalent to 127 billion kronor).
TSMC's strong finish to last year shows that technology investments related to artificial intelligence (AI) around the world are still going strong.
The average forecast among analysts was a net profit of 369.8 billion Taiwanese dollars, according to a compilation of forecasts made by Bloomberg.
Last week, TSMC, with customers such as Nvidia and Apple, reported a sales increase of 39 percent during the quarter to 868.5 billion Taiwanese dollars (nearly 300 billion kronor). It was more than expected.
TSMC is the world's largest manufacturer of advanced chips and the stock soared by over 80 percent in last year's AI boom.
